Six wafers showing progressive stages of production of I C chips

Made:: 1996 in Southampton

Six wafers showing progressive stages of production of I C chips, 1996.

Oxidised wafer (K1342U/1)

1996

Oxide with patterned photoresist (K1342U/2)

1996

After oxide etch: oxide removed

1996

Aluminium deposit

1996

Second pattern in photoresist

1996

Silicon wafer after second etch to remove aluminium (K1342U/6)

1996

Details

Category:: Materials Science Gallery

Object Number:: 1997-438

type:: silicon wafers

credit:: Southampton University Microelectronics Centre

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